EBSD (Electron Back Scattered Diffraction)

Electron backscatter diffraction (EBSD) is a microanalytical technique to examine crystal structure and crystal orientation at nanoscale. EBSD helps to understand properties of crystalline and polycrystalline material. With this technique we can determine internal stresses, defects in samples, orientation texture, grain boundary and many more things.


To perform EBSD the polished sample is placed in SEM at an angle of 70° normal to the electron beam. The detector is nothing but a camera with phosphor screen combined with a digital frame grabber. the detector moves inside towards the sample, avoiding collision between sample surface and phosphor screen. The best possible results can be achieved when the screen is close to the sample and almost perpendicular to beam. Diffracted electrons from electron beam strikes the sample and return as backscattered electron. the intensity of backscattered electron is measured and forms a pattern for a particular structure and orientation. The dedicated software synchronises pattern and scanning beam, further software automatically detects orientation with reference to the kikuchi lines position and width.

Machine Capability

Make and Model:Zeiss, GeminiSEM 300


* Magnification: 12x to 2,000,000x
* Resolution: 0.8 nm at 15 kV Inlens
* Acceleration voltage: 20 V to 30kV


– Inlense, SE, BSD
– EDS (Energy Dispersive x-ray Spectroscopy) for composition analysis
– High speed High Resolution EBSD detector
– TKD (Transmission Kikuchi Diffraction) facility is available and can be performed on TEM samples

Application Works